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Dry etching of Combined Gallium Nitride Epitaxial Layer and Silicon Carbide Substrate

NATIONAL AERONAUTICS AND SPACE ADMINISTRATION.NATIONAL AERONAUTICS AND SPACE ADMINISTRATION.NASA SHARED SERVICES CENTER

ManufacturingNAICS 334413SAM# 80NSSC26936816Q

Posted 2026-07-06 · Response deadline 2026-07-10 · Set-aside: NONE

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